Experts and Tools at Facility

Expert
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Chloe Goings 1
Alex Denton 2
Swaroop Kommera 23
Kam Moler 24
Mary Tang 115
Tool
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Idonus Chip Bonder 3
Plasma Etch 4
Lesker2 Sputter 5
Samco Plasma Etcher 6
Filmetrics F-40 7
Lakeshore Hall Measurement System 8
Plasma Pen 9
Micromist Coater 10
Keyence 11
Eddy Current Measurement System 12
Disco Backgrind 13
Lasercutter 14
Heildelberg MLA 150 - 2 15
Heildelberg MLA 150 - 1 16
Voltera 17
Optomec BJ300 18
Nanoscribe 19
Alveole PRIMO 20
Form2 3D SLA Printer 21
Laurell Develop-Etch 22
Laurell Manual Resist Spinner 25
Drytek 100 Plasma Etcher 26
Alphastep 500 Profilometer 27
Tystar TEOS Deposition 28
STS Deep RIE Etcher 29
Muffle Furnace 30
Savannah/Plasma Cleaner in Glovebox System 31
Clean-1 and 2 Wetbench 32
Thinky Mixer 33
SVG Resist Coat Tracks 1&2 34
Gasonics Aura Asher 35
Nanospec Film Thickness Measurement System 36
Thermco LPCVD Low Temperature Oxide 37
SPTS uetch vapor etch 38
Fume Hoods 1-4 39
Applied Materials Centurion Epitaxial System 40
Flexible Corrosive Wetbench and GaAs 41
ACF Heat Sealer 42
EVG 101 Resist Spray Coater 43
Lam Research TCP 9400 Poly Etcher 44
Prometrix Resistivity Mapping System 45
Thermo LPCVD Nitride 46
Xactix Xenon Difluoride Etcher 47
Glovebox 1-2 48
Aixtron MOCVD - III-V System 49
Germanium wbgen-2 50
ASML PAS 5500/60 i-line Stepper 51
Matrix Plasma Resist Strip 52
Tencor P2 Profilometer 53
Thermco LPCVD Poly 1/2 54
Thermco Oxidation Furnace 55
Cytoviva 56
Aixtron MOCVD - III-N System 57
Miscellaneous Photoresist Wetbench 58
EV Group Contact Aligner 59
MRC Reactive Ion Etcher 60
Sensofar S-neox, non contact 3D optical profiling 61
First Nano carbon nanotube CVD furnace 62
TylanFGA Forming Gas Anneal Furnace 63
Jasco UV/Vis/IR Spectrometer 64
Innotec ES26C E-Gun Evaporator 65
Decon and Clean-3 Wetbench 66
Karl Suss MA-6 Contact Aligner 1&2 67
Applied Materials P5000 Etcher 68
Flexus 2320 69
Aixtron Black Magic graphene CVD furnace 70
Boron Doping Furnace (BBr3) 71
Malvern Zetasizer 72
Metallica Sputter System 73
Solvent Wetbench 74
SVG Resist Develop tracks 1&2 75
Plasma Therm Versaline LL ICP Deep Silicon Etcher 76
J.A. Woollam M2000 Spectroscopic Ellipsometer 77
PlasmaTherm Versaline HDP VCD System 78
Tylan9 Forming Gas Anneal Furnace 79
Photovoltatic test system 80
IntlVac Nanochrome I Evaporator System 81
GnP Poli-400L 82
Blue M Programmable Oven 83
Plasma Therm Versaline LL ICP Metal Etcher 84
Parylene Coater 85
PlasmaTherm Shuttlecock PECVD System 86
AllWin 610 Rapid Thermal Annealer 87
Manual Probe Station 88
Lesker Sputter 89
EV Group Wafer Bonder 90
110 C Oven 91
Plasma Therm Versaline LL ICP Dielectric Etcher 92
Dimatix Nano Inkjetter 93
Savannah Atomic Layer Deposition System 94
AllWin 610 Rapid Thermal Annealer 95
Biologic Potentiostat 96
AJA Evaporator 97
DISCO Wafer Saw 98
90 C Oven 99
Oxford III-V etcher 100
3D Wax Printer 101
Fiji Atomic Layer Deposition 102
Critical Point Dryer 103
Flipchip Bonder 104
Headway Manual Resist Spinner 105
AMT Oxide Plasma Etcher 106
Digital Instruments Nanoscope 3000 AFM 107
YES Prime Oven 108
Oxford Dielectric Etcher 109
Micro Mill 110
Fiji Atomic Layer Deposition 111
Lithography Solvent Bench 112
Manual Spin Coater 113
Hummer V Sputter Coater 114