Experts and Tools at Facility

Expert
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Chloe Goings 1
Alex Denton 2
Swaroop Kommera 23
Kam Moler 24
Mary Tang 115
Tool
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Idonus Chip Bonder 3
Plasma Etch 4
Lesker2 Sputter 5
Samco Plasma Etcher 6
Filmetrics F-40 7
Lakeshore Hall Measurement System 8
Plasma Pen 9
Micromist Coater 10
Keyence 11
Eddy Current Measurement System 12
Disco Backgrind 13
Lasercutter 14
Heildelberg MLA 150 - 2 15
Heildelberg MLA 150 - 1 16
Voltera 17
Optomec BJ300 18
Nanoscribe 19
Alveole PRIMO 20
Form2 3D SLA Printer 21
Laurell Develop-Etch 22
EVG 101 Resist Spray Coater 25
Lam Research TCP 9400 Poly Etcher 26
Prometrix Resistivity Mapping System 27
Thermo LPCVD Nitride 28
Xactix Xenon Difluoride Etcher 29
Glovebox 1-2 30
Aixtron MOCVD - III-V System 31
Germanium wbgen-2 32
ASML PAS 5500/60 i-line Stepper 33
Matrix Plasma Resist Strip 34
Tencor P2 Profilometer 35
Thermco LPCVD Poly 1/2 36
Thermco Oxidation Furnace 37
Cytoviva 38
Aixtron MOCVD - III-N System 39
Miscellaneous Photoresist Wetbench 40
EV Group Contact Aligner 41
MRC Reactive Ion Etcher 42
Sensofar S-neox, non contact 3D optical profiling 43
First Nano carbon nanotube CVD furnace 44
TylanFGA Forming Gas Anneal Furnace 45
Jasco UV/Vis/IR Spectrometer 46
Innotec ES26C E-Gun Evaporator 47
Decon and Clean-3 Wetbench 48
Karl Suss MA-6 Contact Aligner 1&2 49
Applied Materials P5000 Etcher 50
Flexus 2320 51
Aixtron Black Magic graphene CVD furnace 52
Boron Doping Furnace (BBr3) 53
Malvern Zetasizer 54
Metallica Sputter System 55
Solvent Wetbench 56
SVG Resist Develop tracks 1&2 57
Plasma Therm Versaline LL ICP Deep Silicon Etcher 58
J.A. Woollam M2000 Spectroscopic Ellipsometer 59
PlasmaTherm Versaline HDP VCD System 60
Tylan9 Forming Gas Anneal Furnace 61
Photovoltatic test system 62
IntlVac Nanochrome I Evaporator System 63
GnP Poli-400L 64
Blue M Programmable Oven 65
Plasma Therm Versaline LL ICP Metal Etcher 66
Parylene Coater 67
PlasmaTherm Shuttlecock PECVD System 68
AllWin 610 Rapid Thermal Annealer 69
Manual Probe Station 70
Lesker Sputter 71
EV Group Wafer Bonder 72
110 C Oven 73
Plasma Therm Versaline LL ICP Dielectric Etcher 74
Dimatix Nano Inkjetter 75
Savannah Atomic Layer Deposition System 76
AllWin 610 Rapid Thermal Annealer 77
Biologic Potentiostat 78
AJA Evaporator 79
DISCO Wafer Saw 80
90 C Oven 81
Oxford III-V etcher 82
3D Wax Printer 83
Fiji Atomic Layer Deposition 84
Critical Point Dryer 85
Flipchip Bonder 86
Headway Manual Resist Spinner 87
AMT Oxide Plasma Etcher 88
Digital Instruments Nanoscope 3000 AFM 89
YES Prime Oven 90
Oxford Dielectric Etcher 91
Micro Mill 92
Fiji Atomic Layer Deposition 93
Lithography Solvent Bench 94
Manual Spin Coater 95
Laurell Manual Resist Spinner 96
Drytek 100 Plasma Etcher 97
Alphastep 500 Profilometer 98
Tystar TEOS Deposition 99
STS Deep RIE Etcher 100
Muffle Furnace 101
Savannah/Plasma Cleaner in Glovebox System 102
Clean-1 and 2 Wetbench 103
Thinky Mixer 104
SVG Resist Coat Tracks 1&2 105
Gasonics Aura Asher 106
Nanospec Film Thickness Measurement System 107
Thermco LPCVD Low Temperature Oxide 108
SPTS uetch vapor etch 109
Fume Hoods 1-4 110
Applied Materials Centurion Epitaxial System 111
Flexible Corrosive Wetbench and GaAs 112
ACF Heat Sealer 113
Hummer V Sputter Coater 114