Experts and Tools at Facility

Expert
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Chloe Goings 1
Alex Denton 2
Swaroop Kommera 23
Kam Moler 24
Mary Tang 115
Tool
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Idonus Chip Bonder 3
Plasma Etch 4
Lesker2 Sputter 5
Samco Plasma Etcher 6
Filmetrics F-40 7
Lakeshore Hall Measurement System 8
Plasma Pen 9
Micromist Coater 10
Keyence 11
Eddy Current Measurement System 12
Disco Backgrind 13
Lasercutter 14
Heildelberg MLA 150 - 2 15
Heildelberg MLA 150 - 1 16
Voltera 17
Optomec BJ300 18
Nanoscribe 19
Alveole PRIMO 20
Form2 3D SLA Printer 21
Laurell Develop-Etch 22
Aixtron MOCVD - III-V System 25
Germanium wbgen-2 26
ASML PAS 5500/60 i-line Stepper 27
Matrix Plasma Resist Strip 28
Tencor P2 Profilometer 29
Thermco LPCVD Poly 1/2 30
Thermco Oxidation Furnace 31
Cytoviva 32
Aixtron MOCVD - III-N System 33
Miscellaneous Photoresist Wetbench 34
EV Group Contact Aligner 35
MRC Reactive Ion Etcher 36
Sensofar S-neox, non contact 3D optical profiling 37
First Nano carbon nanotube CVD furnace 38
TylanFGA Forming Gas Anneal Furnace 39
Jasco UV/Vis/IR Spectrometer 40
Innotec ES26C E-Gun Evaporator 41
Decon and Clean-3 Wetbench 42
Karl Suss MA-6 Contact Aligner 1&2 43
Applied Materials P5000 Etcher 44
Flexus 2320 45
Aixtron Black Magic graphene CVD furnace 46
Boron Doping Furnace (BBr3) 47
Malvern Zetasizer 48
Metallica Sputter System 49
Solvent Wetbench 50
SVG Resist Develop tracks 1&2 51
Plasma Therm Versaline LL ICP Deep Silicon Etcher 52
J.A. Woollam M2000 Spectroscopic Ellipsometer 53
PlasmaTherm Versaline HDP VCD System 54
Tylan9 Forming Gas Anneal Furnace 55
Photovoltatic test system 56
IntlVac Nanochrome I Evaporator System 57
GnP Poli-400L 58
Blue M Programmable Oven 59
Plasma Therm Versaline LL ICP Metal Etcher 60
Parylene Coater 61
PlasmaTherm Shuttlecock PECVD System 62
AllWin 610 Rapid Thermal Annealer 63
Manual Probe Station 64
Lesker Sputter 65
EV Group Wafer Bonder 66
110 C Oven 67
Plasma Therm Versaline LL ICP Dielectric Etcher 68
Dimatix Nano Inkjetter 69
Savannah Atomic Layer Deposition System 70
AllWin 610 Rapid Thermal Annealer 71
Biologic Potentiostat 72
AJA Evaporator 73
DISCO Wafer Saw 74
90 C Oven 75
Oxford III-V etcher 76
3D Wax Printer 77
Fiji Atomic Layer Deposition 78
Critical Point Dryer 79
Flipchip Bonder 80
Headway Manual Resist Spinner 81
AMT Oxide Plasma Etcher 82
Digital Instruments Nanoscope 3000 AFM 83
YES Prime Oven 84
Oxford Dielectric Etcher 85
Micro Mill 86
Fiji Atomic Layer Deposition 87
Lithography Solvent Bench 88
Manual Spin Coater 89
Laurell Manual Resist Spinner 90
Drytek 100 Plasma Etcher 91
Alphastep 500 Profilometer 92
Tystar TEOS Deposition 93
STS Deep RIE Etcher 94
Muffle Furnace 95
Savannah/Plasma Cleaner in Glovebox System 96
Clean-1 and 2 Wetbench 97
Thinky Mixer 98
SVG Resist Coat Tracks 1&2 99
Gasonics Aura Asher 100
Nanospec Film Thickness Measurement System 101
Thermco LPCVD Low Temperature Oxide 102
SPTS uetch vapor etch 103
Fume Hoods 1-4 104
Applied Materials Centurion Epitaxial System 105
Flexible Corrosive Wetbench and GaAs 106
ACF Heat Sealer 107
EVG 101 Resist Spray Coater 108
Lam Research TCP 9400 Poly Etcher 109
Prometrix Resistivity Mapping System 110
Thermo LPCVD Nitride 111
Xactix Xenon Difluoride Etcher 112
Glovebox 1-2 113
Hummer V Sputter Coater 114