Experts and Tools at Facility

Expert
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Chloe Goings 1
Alex Denton 2
Swaroop Kommera 23
Kam Moler 24
Mary Tang 115
Tool
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Idonus Chip Bonder 3
Plasma Etch 4
Lesker2 Sputter 5
Samco Plasma Etcher 6
Filmetrics F-40 7
Lakeshore Hall Measurement System 8
Plasma Pen 9
Micromist Coater 10
Keyence 11
Eddy Current Measurement System 12
Disco Backgrind 13
Lasercutter 14
Heildelberg MLA 150 - 2 15
Heildelberg MLA 150 - 1 16
Voltera 17
Optomec BJ300 18
Nanoscribe 19
Alveole PRIMO 20
Form2 3D SLA Printer 21
Laurell Develop-Etch 22
PlasmaTherm Shuttlecock PECVD System 25
AllWin 610 Rapid Thermal Annealer 26
Manual Probe Station 27
Lesker Sputter 28
EV Group Wafer Bonder 29
110 C Oven 30
Plasma Therm Versaline LL ICP Dielectric Etcher 31
Dimatix Nano Inkjetter 32
Savannah Atomic Layer Deposition System 33
AllWin 610 Rapid Thermal Annealer 34
Biologic Potentiostat 35
AJA Evaporator 36
DISCO Wafer Saw 37
90 C Oven 38
Oxford III-V etcher 39
3D Wax Printer 40
Fiji Atomic Layer Deposition 41
Critical Point Dryer 42
Flipchip Bonder 43
Headway Manual Resist Spinner 44
AMT Oxide Plasma Etcher 45
Digital Instruments Nanoscope 3000 AFM 46
YES Prime Oven 47
Oxford Dielectric Etcher 48
Micro Mill 49
Fiji Atomic Layer Deposition 50
Lithography Solvent Bench 51
Manual Spin Coater 52
Laurell Manual Resist Spinner 53
Drytek 100 Plasma Etcher 54
Alphastep 500 Profilometer 55
Tystar TEOS Deposition 56
STS Deep RIE Etcher 57
Muffle Furnace 58
Savannah/Plasma Cleaner in Glovebox System 59
Clean-1 and 2 Wetbench 60
Thinky Mixer 61
SVG Resist Coat Tracks 1&2 62
Gasonics Aura Asher 63
Nanospec Film Thickness Measurement System 64
Thermco LPCVD Low Temperature Oxide 65
SPTS uetch vapor etch 66
Fume Hoods 1-4 67
Applied Materials Centurion Epitaxial System 68
Flexible Corrosive Wetbench and GaAs 69
ACF Heat Sealer 70
EVG 101 Resist Spray Coater 71
Lam Research TCP 9400 Poly Etcher 72
Prometrix Resistivity Mapping System 73
Thermo LPCVD Nitride 74
Xactix Xenon Difluoride Etcher 75
Glovebox 1-2 76
Aixtron MOCVD - III-V System 77
Germanium wbgen-2 78
ASML PAS 5500/60 i-line Stepper 79
Matrix Plasma Resist Strip 80
Tencor P2 Profilometer 81
Thermco LPCVD Poly 1/2 82
Thermco Oxidation Furnace 83
Cytoviva 84
Aixtron MOCVD - III-N System 85
Miscellaneous Photoresist Wetbench 86
EV Group Contact Aligner 87
MRC Reactive Ion Etcher 88
Sensofar S-neox, non contact 3D optical profiling 89
First Nano carbon nanotube CVD furnace 90
TylanFGA Forming Gas Anneal Furnace 91
Jasco UV/Vis/IR Spectrometer 92
Innotec ES26C E-Gun Evaporator 93
Decon and Clean-3 Wetbench 94
Karl Suss MA-6 Contact Aligner 1&2 95
Applied Materials P5000 Etcher 96
Flexus 2320 97
Aixtron Black Magic graphene CVD furnace 98
Boron Doping Furnace (BBr3) 99
Malvern Zetasizer 100
Metallica Sputter System 101
Solvent Wetbench 102
SVG Resist Develop tracks 1&2 103
Plasma Therm Versaline LL ICP Deep Silicon Etcher 104
J.A. Woollam M2000 Spectroscopic Ellipsometer 105
PlasmaTherm Versaline HDP VCD System 106
Tylan9 Forming Gas Anneal Furnace 107
Photovoltatic test system 108
IntlVac Nanochrome I Evaporator System 109
GnP Poli-400L 110
Blue M Programmable Oven 111
Plasma Therm Versaline LL ICP Metal Etcher 112
Parylene Coater 113
Hummer V Sputter Coater 114