Savannah/Plasma Cleaner in Glovebox System
Savannah/Plasma Cleaner in Glovebox System
Ultratech - Savannah
nano@stanford
Stanford University
Stanford Nanofabrication Facility
- Thin Film Processing
- Dielectric
- ALD
Description
The MVD (Molecular Vapor Deposition) is a system consisting of a Savannah atomic layer deposition (ALD) system mounted in a glovebox also containing a plasma cleaner. This system is used for the deposition of organic SAMs (Self-Assembled Monolayers.)
Maximum Substrate Size
8 inch
Comments
Designed for deposition of polymer films and MVD-like processes