Gasonics Aura Asher
Gasonics Aura Asher
gasonics - Aura Asher
nano@stanford
Stanford University
Stanford Nanofabrication Facility
- Etching
- Dry
- RIE
Description
The Gasonics Aura Asher is an automated upstream microwave plasma system used for stripping photoresist of clean 4 inch silicon wafers.
Maximum Substrate Size
4 inch