Innotec ES26C E-Gun Evaporator

Innotec is an E-beam metal evaporation system, capable of depositing either single or multiple metallic thin films. Evaporation is a directional process and hence very good for lift-off applications. Innotec allows precisely controlled film thickness for films up to 1_m in thickness. Innotec is classified as gold contaminated. Many sources are available for film deposition including (but not limited to): Au, Cu, Cr, Pt, Ag, and Si (full list in Innotec Process Capabilities).