110 C Oven
110 C Oven
Blue M
nano@stanford
Stanford University
Stanford Nanofabrication Facility
- Thin Film Processing
- Polymer
- Other
Description
This oven is used for the standard 110 C "post-bake" of lithography wafers following develop.
Maximum Substrate Size
8 inch
Comments
Oven for surface prep, polymer setting, curing, etc