Alphastep 500 Profilometer
Alphastep 500 Profilometer
KLA Tencor - Alphastep 500
nano@stanford
Stanford University
Stanford Nanofabrication Facility
- Metrology/Characterization
- Structure or Device
- Profilometry
Description
The Tencor Alphastep 500 is a stylus-based surface profiler to measure step heights of surfaces. A stylus is placed in contact with, and then gently dragged along the surface of the substrate. The vertical deflection measures the change in step height.
Maximum Substrate Size
6 inch