SVG Resist Coat Tracks 1&2
SVG Resist Coat Tracks 1&2
SVG - SVG 8400/8600
nano@stanford
Stanford University
Stanford Nanofabrication Facility
- Thin Film Processing
- Polymer
- Spin Coating
Description
The SVG coater is an automated track system for dispensing photoresist on 4" silicon, glass, or quartz wafers. The system includes two stations: a combination spinner, which dispenses photoresist, and pre-bake oven which sets the resist. Track #1 also contains an HMDS bake/prime station. The uniformity of spun photoresists are typically +/- 100 .
Maximum Substrate Size
4 inch