Lesker2 Sputter
Lesker2 Sputter
Kurt J. Lesker - PVD 200
nano@stanford
Stanford University
Stanford Nanofabrication Facility
- Thin Film Processing
- Metal
- Sputter
Description
Lesker2 is a load locked single wafer metal sputter providing flexible processing options for non-CMOS compatible materials. The eight gun magnetron Lesker is classified as gold contaminated and provides non-directional thin film (< 1 um).
Maximum Substrate Size
6 inch