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Tencor P2 Profilometer

Tencor P2 Profilometer

KLA Tencor - P2

nano@stanford Stanford University Stanford Nanofabrication Facility
  • Metrology/Characterization
    • Structure or Device
      • Profilometry
Description
The Tencor P2 Long Scan Profiler is a computerized, high-sensitive surface profiler that measures step height and roughness in a variety of applications.
Maximum Substrate Size
6 inch
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