SVG Resist Develop tracks 1&2
SVG Resist Develop tracks 1&2
SVG - SVG 8600
nano@stanford
Stanford University
Stanford Nanofabrication Facility
- Thin Film Processing
- Polymer
- Other
Description
The SVG (Silicon Valley Group) developer is an automated system with two independent tracks for developing and post-baking exposed, photoresist-coated, 4" wafers. Each track system includes two stations: a spin station which dispenses and rinses away developer; and an oven station for post-bake.
Maximum Substrate Size
4 inch
Comments
Develop track