Savannah Atomic Layer Deposition System
Savannah Atomic Layer Deposition System
Ultratech - Savannah
nano@stanford
Stanford University
Stanford Nanofabrication Facility
- Thin Film Processing
- Dielectric
- ALD
Description
The Savannah S200 is a thermal, atomic layer deposition (ALD) system from Cambridge Nanotech. The system can accommodate samples from pieces up to a single 8" wafer.
Maximum Substrate Size
8 inch