Blue M Programmable Oven
Blue M Programmable Oven
Blue M
nano@stanford
Stanford University
Stanford Nanofabrication Facility
- Thin Film Processing
- Polymer
- Other
Description
Th BlueM oven is for high temperature convection baking , i.e. polyimide at temps of 200C to 437C.
Maximum Substrate Size
8 inch
Comments
Oven for surface prep, polymer setting, curing, etc