Eddy Current Measurement System
Eddy Current Measurement System
Semilab - LEI 1510
nano@stanford
Stanford University
Stanford Nanofabrication Facility
- Metrology/Characterization
- Thin Film
- Electrical
Description
The LEI 1510 is a non-contact mapping system for measuring sheet resistance, bulk resistivity, and capacitance thickness on substrates.
Maximum Substrate Size
8 inch