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Sensofar S-neox, non contact 3D optical profiling

Sensofar S-neox, non contact 3D optical profiling

Sensofar - S-neox

nano@stanford Stanford University Stanford Nanofabrication Facility
  • Metrology/Characterization
    • Structure or Device
      • Profilometry
Description
The S-neox system from Sensofar is a 3D optical profiler combining confocal, interferometry, and focus variation techniques in the same sensor head without any moving parts. It is ideal for obtaining a fast, non-invasive assessment of the micro- and nanogeometry of technical surfaces in multiple configurations.
Maximum Substrate Size
8 inch
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