Sensofar S-neox, non contact 3D optical profiling
Sensofar S-neox, non contact 3D optical profiling
Sensofar - S-neox
nano@stanford
Stanford University
Stanford Nanofabrication Facility
- Metrology/Characterization
- Structure or Device
- Profilometry
Description
The S-neox system from Sensofar is a 3D optical profiler combining confocal, interferometry, and focus variation techniques in the same sensor head without any moving parts. It is ideal for obtaining a fast, non-invasive assessment of the micro- and nanogeometry of technical surfaces in multiple configurations.
Maximum Substrate Size
8 inch