Filmetrics F-40
Filmetrics F-40
Filmetrics - F40
nano@stanford
Stanford University
Stanford Nanofabrication Facility
- Metrology/Characterization
- Thin Film
- Thickness
Description
The Filmetrics F-40 system uses non-contact, spectro-reflectometry (measurement of the intensity of reflective light as a function of incident wavelength) to determine the thickness and index(n & k)of transparent films on substrates. The F40 spectrometter is mounted on an inspection microscope allowing spot sizes ranging from 2.5(100x obj) - 50um(5x obj) to be measured.