Miscellaneous Photoresist Wetbench
Miscellaneous Photoresist Wetbench
NA - NA
nano@stanford
Stanford University
Stanford Nanofabrication Facility
- Cleaning
- All Cleaning
- Wet Bench
Description
The wbmiscres wet bench is primarily used for manual spinning and developing of photoresist. No solvents may be used here. The bench is equipped with a rinse sink with a gooseneck, an automatic dump rinser, two N2 guns, DI hand sprayer, and hot plate. There are two spin/rinse dryers located to the left of the bench for 4 or 6 inch wafers. The headway manual spinner is mounted on the right side of the bench top.
Maximum Substrate Size
8 inch