First Nano carbon nanotube CVD furnace
First Nano carbon nanotube CVD furnace
First Nano - EasyTube 3000EXT
nano@stanford
Stanford University
Stanford Nanofabrication Facility
- Thin Film Processing
- Dielectric
- Other
Description
The First Nano CVD furnace is dedicated to carbon nanotube synthesis and can accommodate multiple pieces or a 4" wafer. Methane, hydrogen and ethanol are available as process gases and thus provide versatility for both SWCNT growth as well as vertical forest growth. Process recipes for horizontally aligned SWCNT growth on ST-cut quartz (available from the SNF stockroom) have been optimized and are available to the user, with typical yields of 1-5 SWCNTs per micron depending on the catalyst used.
Maximum Substrate Size
4 inch
Comments
Carbon Nanotubes - metallic, but not metal