EVG 101 Resist Spray Coater
EVG 101 Resist Spray Coater
EV group - EVG 101
nano@stanford
Stanford University
Stanford Nanofabrication Facility
- Thin Film Processing
- Polymer
- Spray Coating
Description
The EVG 101 spray coater allows pieces up to 6" wafers to be spray coated with photoresists and potentially other types of polymers or atomizable materials.
Maximum Substrate Size
8 inch