NNCI 2022 Etch Symposium
The 2022 NNCI Etch Symposium, “Advances in Micro- and Nanoscale Etching for Novel Electronic, Photonic, and Quantum Based Devices”, was held at the University of Pennsylvania on April 21-22, 2022. Meeting organizers included Eric Johnston (University of Pennsylvania QNF), Vince Genova (Cornell University CNF), Ling Xie (Harvard University CNS), and Jason Tower (Stanford University).
Day 1 of the symposium included an internal meeting of NNCI technical staff and invited non-NNCI staff. Member NNCI sites provided updates on new etch equipment and newly developed etch processes. Equipment vendors gave technical presentations to highlight their latest developments in etch processes such as atomic layer etching (ALE) and those processes critical for electronic, photonic, and quantum-based devices.
- ALE for Low Loss Quantum Devices - Russ Renzas (Oxford Instruments)
- Low Temperature Plasma Technologies for Advanced Packaging Applications - David Lishan (Plasmatherm)
- Endpoint Detection for Plasma Etching - Joshua Perlstein (SPTS)
- Dry Etch at Nano3/SDNI UC San Diego - Conor Holzhall and Xuekun Lu (UC-San Diego)
Day 2 was an open public event with invited and contributed talks by experts from academic labs. Topics discussed included etching aspects in a broad range of nanotechnology, including quantum and nanophotonic device fabrication to the role of artificial intelligence (AI) in the fab.
- Quantum Applications Build on Creative Nanofabrication - Tony Zhou (MIT)
- Fabrication of Si, Si3N4 & InGaAsP Optical Metasurfaces with Dry Etching - Lidan Zhang (Penn State Univ.)
- Faster & Lower Power Solutions via Thin Film Lithium Niobate - Christian Reimer (HyperLite Corp.)
- SiO2 Dry Etching with Ru Hardmasks: Verticality and >100 Selectivity - Demis John (UC-Santa Barbara)
- Role of Artificial Intelligence in Nanomanufacturing - Benyamin Davaji (Northeastern Univ.)
- LiNbO3 Nanophotonic Platform for Non-linear Optics - Rebecca Cheng (Harvard Univ.)
- AlN and AlScN RF Microsystems - Matteo Rinaldi (Northeastern Univ.)
- Quantum & Non-linear Photonics in Silicon Carbide - Daniil Lukin (Stanford Univ.)
- Photonic Integration and Acousto-Optics in Aluminum Nitride - Siddhartha Ghosh (Northeastern Univ.)
- Etching (and Other Important Aspects) of AlScN Materials - Troy Olsson (Univ. of Pennsylvania)