Etch Workshop 2016

NNCI Etch Workshop (May 2016 at Cornell University)

NNCI Dry Etch Capabilities

Site Overview Presentations

• Arizona State University (NCI-SW)
• Cornell University (CNF)
• Georgia Tech (SENIC)
• Harvard University (CNS)
• University of Minnesota (MINIC)
• University of Pennsylvania (MANTH)
• Stanford University (nano@stanford)
• University of Washington (NNI)
• University of North Carolina (RTNN)
• University of Louisville (KY MMNIN)
• University of Nebraska-Lincoln (NNF)
• University of Texas Austin (TNF)

Technical Presentations

• Diamond Nitrogen Vacancy Research (Harvard, L. Xie)
• HBr Etching of Silicon (Cornell, V. Genova)
• Highly Selective Silicon Nitride to Silicon Oxide Etch Process in Oxford 100 ICP (Cornell, V. Genova)
• Student Staff - Training by Etching (Minnesota)
• Silicon DRIE vs. Germanium DRIE: A Comparison in the Plasmatherm VLN (Cornell, V. Genova)
• Si DRIE in Plasmatherm Deep Silicon Etcher (Stanford, U. Raghuram)
• Metal Etching with the Bosch Process (UNC)