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Zeiss Auriga Crossbeam FIB-FESEM

Zeiss Auriga Crossbeam FIB-FESEM

Zeiss - AURIGA CrossBeam

SENIC Joint School of Nanoscience and Nanoengineering Joint School of Nanoscience and Nanoengineering
  • Imaging
    • All Imaging
      • FIB
Description
AURIGA CrossBeam consists of a field emission scanning electron microscope (FE-SEM) with GEMINI column accompanied by a Focused Gallium Ion Beam (FIB) column that offers Cross-sectioning, Nanotomography, Nanopatterning, 3D-Analytics, and TEM lamella preparation. Additionally, the system allows for elemental characterization through energy-dispersive X-ray spectroscopy (EDS/EDX).
Maximum Substrate Size
8 inch
Comments
3 inch max through air-lock
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