Zeiss Auriga Crossbeam FIB-FESEM
Zeiss Auriga Crossbeam FIB-FESEM
Zeiss - AURIGA CrossBeam
SENIC
Joint School of Nanoscience and Nanoengineering
Joint School of Nanoscience and Nanoengineering
- Imaging
- All Imaging
- FIB
Description
AURIGA CrossBeam consists of a field emission scanning electron microscope (FE-SEM) with GEMINI column accompanied by a Focused Gallium Ion Beam (FIB) column that offers Cross-sectioning, Nanotomography, Nanopatterning, 3D-Analytics, and TEM lamella preparation. Additionally, the system allows for elemental characterization through energy-dispersive X-ray spectroscopy (EDS/EDX).
Maximum Substrate Size
8 inch
Comments
3 inch max through air-lock