YES-R1 Plasma Cleaner
YES-R1 Plasma Cleaner
Yield Enineering Systems, Inc. - YES-R1
NNF
University of Nebraska-Lincoln
Nebraska Center for Materials and Nanoscience (NCMN)
- Cleaning
- All Cleaning
- Plasma/Stripper
Description
The Plasma Cleaner uses an active ionized gas (plasma) in a low pressure environment to descum and remove residual organics and thin oxides from samples. -typical chamber temperature 25C-80C (heat from plasma) -little to no turbulence -Ar or O2 gas -sample size can vary from small pieces to 12inx12inx4in
Maximum Substrate Size
12 inch