XPS
XPS
Kratos - Axis Ultra DLD
RTNN
University of North Carolina
Chapel Hill Analytical and Nanofabrication Laboratory (CHANL)
- Metrology/Characterization
- Thin Film
- XPS
Description
The Kratos Axis Ultra DLD XPS system allows for elemental and chemical environment analysis within the top 10 nm of a surface. It is equipped with a Mg and a monochromatic Al source, and can take data down to spot sizes of 15 um.