XPS

XPS provides elemental composition and chemical bonding information on the samples first few atomic layers.XPS is also refered to as Electron Spectroscopy for Chemical Analysis. The technique relies on the emission of secondary electrons from the surface after the near surface atoms have been excited with X-rays. XPS provides the energy resolution needed to detect elemental peak position energy shifts due to chemical bond formation. Information is typically obtained for the region within 3-5 nm of the outer surface. Angle resolved XPS can allow analysis of regions even closer to the sample surface. XPS depth profiling or angle-resolved XPS can be performed to determine elemental composition and chemical bonding information for layers below the surface. Relative atomic concentration percentages can be determined with a sensitivity of 0.1 to 1 atomic % for Li and heavier elements. Analysis is carried out in an ultrahigh vacuum system (~10-9 Torr or better).