Xactix Xenon Difluoride Etcher
Xactix Xenon Difluoride Etcher
SPTS -
SENIC
Georgia Tech
Institute for Electronics and Nanotechnology Micro/Nano Fabrication Facility
- Etching
- Dry
- Other
Description
This tool uses xenon difluoride gas sent through a showerhead to isotropically dry etch silicon, germanium, and molybdenum. It can process pieces up to 4"; wafers and generates relatively rough isotropically etched features.
Maximum Substrate Size
4 inch