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Wyko Optical Profilometer

Wyko Optical Profilometer

Wyko - NT9100

RTNN North Carolina State University NCSU Nanofabrication Lab (NNF)
  • Metrology/Characterization
    • Structure or Device
      • Profilometry
Description
The Wyko Optical Profilometer can measure the thickness of deposited or etched films via the vertical step-height measurement technique. Surface mapping and roughness can also be characterized. Stitching ability of the tool allows the user to characterize large areas.
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