Woollam Spectroscopic Ellipsometer
Woollam Spectroscopic Ellipsometer
J.A. Woollam - WVASE32
CNS
Harvard University
Center for Nanoscale Systems (CNS)
- Metrology/Characterization
- Thin Film
- Thickness
Description
Equipment description and usage:
Woollam V-VASE32 vertical angle spectroscopic ellipsomer is used for non-invasive characterizing of multilayer film thickness, optical constants, film composition, crystallinity, surface and interface roughness, anisotropy, birefringence, bandgap and electronic transitions. The spectral range of system covers from 193 to 1700 nm. Incident angle can be automatically adjusted from 20 - 70. The system also equipped with Auto-Retarder for high accuracy and depolarization, anisotropy, or Mueller-Matrix measurement.
Applications:
This is system is currently configured for general purpose.
Features:
* Spectral range: 193 1700 nm
* Angle of incidence: 20 - 70, automatic
* Double monochromator for superior stray-light rejection
* AutoRetarder for high accuracy measurement and depolarization, anisotropy, or Mueller-Matrix
* Up to 200 mm diameter samples
Woollam V-VASE32 vertical angle spectroscopic ellipsomer is used for non-invasive characterizing of multilayer film thickness, optical constants, film composition, crystallinity, surface and interface roughness, anisotropy, birefringence, bandgap and electronic transitions. The spectral range of system covers from 193 to 1700 nm. Incident angle can be automatically adjusted from 20 - 70. The system also equipped with Auto-Retarder for high accuracy and depolarization, anisotropy, or Mueller-Matrix measurement.
Applications:
This is system is currently configured for general purpose.
Features:
* Spectral range: 193 1700 nm
* Angle of incidence: 20 - 70, automatic
* Double monochromator for superior stray-light rejection
* AutoRetarder for high accuracy measurement and depolarization, anisotropy, or Mueller-Matrix
* Up to 200 mm diameter samples