WAFAB HF/TMAH Bench
WAFAB HF/TMAH Bench
WAFAB International - NA
SHyNE Resource
The University of Chicago
Pritzker Nanofabrication Facility (PNF)
- Etching
- Wet
- Wet Bench
Description
The WAFAB Manual Solvent Bench is a non-automated front-access wet bench designed to handle hydrofluoric acid and tetramethylammonium hydroxide used in etching.
Maximum Substrate Size
6 inch