Veeco NT1100 Optical Profiling System
Veeco NT1100 Optical Profiling System
Bruker - NT1100
SDNI
University of California, San Diego
Nano3 Cleanroom Facility
- Metrology/Characterization
- Structure or Device
- Optical
Description
The Veeco NT1100 optical profiler provides accurate, non- contact surface metrology for applications in MEMS, thick films, optics, ceramics, advanced materials and more. The system utilizes white light interferometry for high resolution 3D surface measurements, from sub - nanometer roughness to millimeter- high steps (0.1 nm - 1mm range). The system is equipped with an automated stitching stage for substrates up to 4 inches in diameter.
Maximum Substrate Size
4 inch