Thermo K-Alpha XPS
Thermo K-Alpha XPS
Thermo Fisher Scientific - K-Alpha XPS
SENIC
Georgia Tech
Materials Characterization Facility
- Metrology/Characterization
- Thin Film
- XPS
Description
X-ray Photoelectron Spectroscopy (XPS) is an analytical technique that directs a monochromatic beam of x-rays onto a sample and detects the characteristic electrons that are ejected. The energies and number of these electrons can be used to determine not only the elements present on the sample surface, but their abundance and chemical bonding state as well. Elements from Li to U can be detected. The technique is highly surface sensitive the typical detection depth is ~5 nm and can detect light elements such as Si (Z =14) and below at about 1% of the total surface composition and heavier elements down to ~0.1 % with an accuracy of 20 50 percent of the given value.
Maximum Substrate Size
2 inch
Comments
Vacuum transfer for air-sensitive samples