Thermo Fisher Scientific Apreo SEM
Thermo Fisher Scientific Apreo SEM
Thermo Fisher - Apreo
SDNI
University of California, San Diego
Nano3 Cleanroom Facility
- Imaging
- All Imaging
- SEM
Description
Thermo Fisher Apreo HiVac SEM is a Schottky Field Emission Scanning Electron Microscope (FESEM) that combines high and low-voltage ultra-high resolution capabilities with an electrostatic lens design. The instrument features beam deceleration and unique in-lens detection offering unprecedented contrast and versatility to researchers working with a variety of materials and devices. Achievable resolution is 0.8nm at 15kV and 1.0nm at 1kV using the immersion lens. The Pathfinder EDS software from Thermo Scientific enables user friendly energy dispersive X-ray microanalysis (EDX).
Maximum Substrate Size
4 inch