Tencor P15 Profilometer (right)
Tencor P15 Profilometer (right)
KLA Tencor - P-15
SENIC
Georgia Tech
Institute for Electronics and Nanotechnology Micro/Nano Fabrication Facility
- Metrology/Characterization
- Structure or Device
- Profilometry
Description
The KLA-Tencor P-15 profiler is a highly sensitive surface profiler that measures step height and stress on a wafer surface.
Specifications:
-131um max step height
-6" sample or smaller
-film stress measurement
Specifications:
-131um max step height
-6" sample or smaller
-film stress measurement
Maximum Substrate Size
6 inch