Tencor P15 Profilometer (left)
Tencor P15 Profilometer (left)
KLA Tencor - P-15
SENIC
Georgia Tech
Institute for Electronics and Nanotechnology Micro/Nano Fabrication Facility
- Metrology/Characterization
- Structure or Device
- Profilometry
Description
The KLA-Tencor P-15 profiler is a highly sensitive surface profiler that measures step height and stress on a wafer surface.
Specifications:
-327um max step height
-6" sample or smaller
Specifications:
-327um max step height
-6" sample or smaller
Maximum Substrate Size
6 inch