Tencor P15 Profilometer
Tencor P15 Profilometer
KLA Tencor - P-15
SENIC
Georgia Tech
Institute for Electronics and Nanotechnology Micro/Nano Fabrication Facility
- Metrology/Characterization
- Structure or Device
- Profilometry
Description
The KLA Tencor P15 is a robust, programmable stylus profiler system that provides 2D and 3D topographic measurements.
Specifications:
-364um max step height
-6" sample or smaller
-2um radius, 60 degree tip
Specifications:
-364um max step height
-6" sample or smaller
-2um radius, 60 degree tip
Maximum Substrate Size
6 inch