Suss MJB4 Contact Aligner
Suss MJB4 Contact Aligner
Suss Microtech - MJB4
CNF
Cornell University
Cornell NanoScale Science & Technology Facility (CNF)
- Lithography
- All Lithography
- UV
Description
The MJB4 is a contact aligner with front side alignment and back side alignment via IR. substrate sizes ranging 5mm square to 100mm in diameter. It is capable of printing 0.5um lines and spaces with a light source of wavelength range between 350 and 450nm. The MJB4 has 5 exposure modes; Soft Contact, Hard Contact, Vacuum Contact, Soft Vacuum Contact and Gap Exposure.
Maximum Substrate Size
4 inch