Suss MA6-BA6 Contact Aligner

The MA6 is a workhorse contact lithography system (contact aligner) for up to 150 mm wafers. It can align to features on either the front or the back of the wafer using a video alignment system. The versatile mask holder allows both round and square plates as masks, and the sample plate accommodates small and odd-shaped substrates. It can also be used in conjunction with the SB8e for aligned wafer bonding.