Spin Rinser & Drier- 8"
Spin Rinser & Drier- 8"
Flourocarbon - 1800
TNF
University of Texas at Austin
Microelectronics Research Center (MRC)
- Cleaning
- All Cleaning
- Spin Rinse Drying
Description
Spin Rinser & Dryer after wafer cleaning in Hood C14;
Maximum Substrate Size
8 inch