Spin Coater
Spin Coater
Laurell - WS-400B
SHyNE Resource
Northwestern University
Northwestern University Atomic and Nanoscale Characterization Experimental Center (NUANCE)
- Thin Film Processing
- Polymer
- Spin Coating
Description
Spin coating involves accurately dispensing a liquid, typically photoresist, onto a substrate, typically a semiconductor wafer, then spinning to achieve a uniform, defect-free film. Our original, now-famous spin coater design employs the use of extremely precise rotation control coupled with a closed, fully optimized process chamber, leaving absolutely nothing to chance.