Spectroscopic Ellipsometer

Very fast data acquisition with large spectral range. The M-2000V model can measure from 370nm to 1700nm. Measures enough wavelengths to obtain thickness from thick photoresists (up to 10 microns thick). The ideal instrument for fast thickness uniformity mapping and in-situ applications, such as real-time dissolution rate monitoring. This ellipsometer is capable of scanning areas ranging from 1cm2 to 6 in2 and patterns from single point scans to a 32+ point profile.