Semitool Spin Rinse Dryer -- Instructional Center
Semitool Spin Rinse Dryer -- Instructional Center
OEM Group -
SENIC
Georgia Tech
Institute for Electronics and Nanotechnology Micro/Nano Fabrication Facility
- Cleaning
- All Cleaning
- Spin Rinse Drying
Description
The spin-rinse-dryer is equipped for cleaning four-inch silicon wafers. It spins the wafers and uses deionized water and nitrogen to clean and dry the wafers.