SCS Spin Coater
SCS Spin Coater
Specialty Coating Systems - SCS 6808P
NNI
University of Washington
Washington Nanofabrication Facility (WNF)
- Lithography
- All Lithography
- Resist Processing
Description
Basic spin coater using Headway style D-chucks
Restrictions
None
Maximum Substrate Size
6 inch
Comments
Qty 4 - one dedicated to EBL resists