Reflectometer
Reflectometer
Filmetrics - F20
SHyNE Resource
Northwestern University
Northwestern University Micro/Nano Fabrication Facility (NUFAB)
- Metrology/Characterization
- Thin Film
- Thickness
Description
This tool measures the thickness of transparent films by interference reflectometry. It can measure the thickness of multilayer films as well.
Maximum Substrate Size
6 inch