Rapid Thermal Processing (RTP)

Molecular Process Technology - RTP-6000

KY Multiscale University of Kentucky Center for Nanoscale Science and Engineering (CeNSE)

Thin Film Processing
- Dielectric
  - RTA/RTP

Description

RTP is a flexible technology that provides fast heating and cooling to process temperatures of ~200-1300C with ramp rates typically 20-250C/sec, combined with excellent gas ambient control, allowing the creation of sophisticated multistage processes within one processing recipe.