Profilometer: Bruker Dektak 150
Profilometer: Bruker Dektak 150
Bruker - Dektak 150
nano@stanford
Stanford University
Stanford Nano Shared Facilities
- Metrology/Characterization
- Structure or Device
- Profilometry
Description
Bruker Dektak 150 - This is a measuring instrument used to measure a surface's profile, in order to quantify its roughness. Vertical resolution is usually in the nanometer (nm) level, though lateral resolution is usually poorer. A diamond stylus is moved vertically in contact with a sample and then moved laterally across the sample for a specified distance and specified contact force.
A profilometer can measure small surface variations in vertical stylus displacement as a function of position. A typical profilometer can measure small vertical features ranging in height from 10 nm to 1 mm. The height position of the diamond stylus generates an analog signal which is converted into a digital signal stored, analyzed and displayed. The radius of diamond stylus ranges from 20 nm to 25 μm, and the horizontal resolution is controlled by the scan speed and data signal sampling rate. The stylus tracking force can range from less than 1 to 50 mgs.
A profilometer can measure small surface variations in vertical stylus displacement as a function of position. A typical profilometer can measure small vertical features ranging in height from 10 nm to 1 mm. The height position of the diamond stylus generates an analog signal which is converted into a digital signal stored, analyzed and displayed. The radius of diamond stylus ranges from 20 nm to 25 μm, and the horizontal resolution is controlled by the scan speed and data signal sampling rate. The stylus tracking force can range from less than 1 to 50 mgs.