Parylene Coater
Parylene Coater
SCS - Labcoter2
SHyNE Resource
Northwestern University
Northwestern University Micro/Nano Fabrication Facility (NUFAB)
- Thin Film Processing
- Polymer
- Other
Description
Ultrathin Parylene coatings are inert and biocompatible. Parylene polymer are applied via vapor depositon equipment, which allows for the precise control of coating rate and thickness. Parylene coatings can be applied in thicknesses from several hundred angstroms to 75 microns.
Maximum Substrate Size
6 inch