Optical Profilometer
Optical Profilometer
Zygo - Zescope
NCI-SW
Arizona State University
Eyring Materials Center
- Metrology/Characterization
- Structure or Device
- Profilometry
Description
Optical profilometry uses white light interferometry to generate a 3D image of the sample surface with a height resolution better than 1.
Maximum Substrate Size
12 inch