Nanoscribe 3D Lithography System
Nanoscribe 3D Lithography System
Nanoscribe - Photonic Professional GT
CNS
Harvard University
Center for Nanoscale Systems (CNS)
- Lithography
- All Lithography
- Other
Description
Nanoscribes 3D laser lithography system, Photonic Professional GT, is a fast and powerful platform for micro- and nanofabrication demands up to the third dimension. Almost arbitrarily complex shaped polymer structures with finest feature sizes in the sub-micrometer range can be achieved by means of two-photon polymerization. A tremendous speed-up of the writing process is driven by an embedded ultra-high precision Galvo technology, which laterally deflects the laser focus position by use of a galvanic mirror system. Thus, the fabrication of large area 3D micro- and nanostructures is now feasible in shortest time. In addition to rapid x-y-beam-scanning, a piezoelectric scanning stage provides ultra-precise x-y-z-movements of the substrate relative to the laser focus position.
The table-top laser lithography system is fully automated. An intuitive, user- friendly software as integral part of an innovative workflow eases demanding tasks and secures their successful completion. Structures can either be designed in 3D printer compatible CAD software programs or directly implemented in Nanoscribe _s GWL scripting language.
The table-top laser lithography system is fully automated. An intuitive, user- friendly software as integral part of an innovative workflow eases demanding tasks and secures their successful completion. Structures can either be designed in 3D printer compatible CAD software programs or directly implemented in Nanoscribe _s GWL scripting language.

Highest resolution commercially available 3D printer (150nm for X, Y; 450nm for Z)
Fast and accurate by galvo and piezo technology
Easy fabrication of 3D micro- and nanostructures
Two-photon polymerization of various UV-curable photoresists Writing area up to the centimeter range
User-friendly software package
Easy CAD import via DXF, STL file format