Lucas Labs 4PP
Lucas Labs 4PP
Lucas Labs
MANTH
University of Pennsylvania
Singh Center for Nanotechnology
- Metrology/Characterization
- Structure or Device
- Electrical
Description
4 point prohe. Wafer sizes from pieces to 150mm
Manual system that combines with a current source and electronic DVM combined
Accuracy of better than 1% over the resistivity range from 1 milli-ohm to 2 Meg-ohms per square.
Simple to perform sheet and bulk resistivity measurements
Manual system that combines with a current source and electronic DVM combined
Accuracy of better than 1% over the resistivity range from 1 milli-ohm to 2 Meg-ohms per square.
Simple to perform sheet and bulk resistivity measurements
Maximum Substrate Size
6 inch