LPCVD P+polysilicon CVD- Bank D-4
LPCVD P+polysilicon CVD- Bank D-4
MRL - Cyclone
CNF
Cornell University
Cornell NanoScale Science & Technology Facility (CNF)
- Thin Film Processing
- Dielectric
- CVD
Description
CVD of p+ polysilicon
Restrictions
Silicon only
Maximum Substrate Size
6 inch