Lesker PVD75 #2 ZnO Sputter deposition

Lesker PVD75 #2 ZnO Sputter deposition

Kurt J Lesker - PVD75

NCI-SW Arizona State University ASU NanoFab
  • Thin Film Processing
    • Metal
      • Sputter
Description
ZnO film deposition
Maximum Substrate Size
6 inch
Comments
Dedicated ZnO deposition tool
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